Presentation + Paper
20 March 2018 Thread scheduling for GPU-based OPC simulation on multi-thread
Heejun Lee, Sangwook Kim, Jisuk Hong, Sooryong Lee, Hwansoo Han
Author Affiliations +
Abstract
As semiconductor product development based on shrinkage continues, the accuracy and difficulty required for the model based optical proximity correction (MBOPC) is increasing. OPC simulation time, which is the most timeconsuming part of MBOPC, is rapidly increasing due to high pattern density in a layout and complex OPC model.

To reduce OPC simulation time, we attempt to apply graphic processing unit (GPU) to MBOPC because OPC process is good to be programmed in parallel. We address some issues that may typically happen during GPU-based OPC simulation in multi thread system, such as “out of memory” and “GPU idle time”. To overcome these problems, we propose a thread scheduling method, which manages OPC jobs in multiple threads in such a way that simulations jobs from multiple threads are alternatively executed on GPU while correction jobs are executed at the same time in each CPU cores. It was observed that the amount of GPU peak memory usage decreases by up to 35%, and MBOPC runtime also decreases by 4%. In cases where out of memory issues occur in a multi-threaded environment, the thread scheduler was used to improve MBOPC runtime up to 23%.
Conference Presentation
© (2018) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Heejun Lee, Sangwook Kim, Jisuk Hong, Sooryong Lee, and Hwansoo Han "Thread scheduling for GPU-based OPC simulation on multi-thread", Proc. SPIE 10587, Optical Microlithography XXXI, 105870P (20 March 2018); https://doi.org/10.1117/12.2295696
Lens.org Logo
CITATIONS
Cited by 1 scholarly publication.
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Optical proximity correction

Computer simulations

Semiconductors

Optical lithography

Tolerancing

Communication engineering

Electronics

Back to Top