Shack-Hartmann reflective micro profilometer

Hai Gong; Oleg Soloviev; Michel Verhaegen; Gleb Vdovin

doi:10.1117/12.2295688

10 January 2018 Shack-Hartmann reflective micro profilometer

Hai Gong, Oleg Soloviev, Michel Verhaegen, Gleb Vdovin

Proceedings Volume 10616, 2017 International Conference on Optical Instruments and Technology: Optical Systems and Modern Optoelectronic Instruments; 106160M (2018) https://doi.org/10.1117/12.2295688
Event: International Conference on Optical Instruments and Technology 2017, 2017, Beijing, China

Abstract

We present a quantitative phase imaging microscope based on a Shack-Hartmann sensor, that directly reconstructs the optical path difference (OPD) in reflective mode. Comparing with the holographic or interferometric methods, the SH technique needs no reference beam in the setup, which simplifies the system. With a preregistered reference, the OPD image can be reconstructed from a single shot. Also, the method has a rather relaxed requirement on the illumination coherence, thus a cheap light source such as a LED is feasible in the setup. In our previous research, we have successfully verified that a conventional transmissive microscope can be transformed into an optical path difference microscope by using a Shack-Hartmann wavefront sensor under incoherent illumination. The key condition is that the numerical aperture of illumination should be smaller than the numerical aperture of imaging lens. This approach is also applicable to characterization of reflective and slightly scattering surfaces.

Citation Download Citation

Hai Gong, Oleg Soloviev, Michel Verhaegen, and Gleb Vdovin "Shack-Hartmann reflective micro profilometer", Proc. SPIE 10616, 2017 International Conference on Optical Instruments and Technology: Optical Systems and Modern Optoelectronic Instruments, 106160M (10 January 2018); https://doi.org/10.1117/12.2295688

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