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15 May 2018 Fourier ptychography at short wavelength with a synchrotron-based microscope (Conference Presentation)
Antoine Wojdyla, Markus P. Benk, Kenneth A. Goldberg, Patrick P. Naulleau
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Proceedings Volume 10669, Computational Imaging III; 106690M (2018) https://doi.org/10.1117/12.2303447
Event: SPIE Commercial + Scientific Sensing and Imaging, 2018, Orlando, FL, United States
Abstract
Fourier Ptychography is a novel imaging technique consists in combining many coherent images acquired with various illumination angle and combined using an efficient phase retrieval algorithm. This technique allows to synthesize a larger numerical aperture than physically possible by the lens aperture alone, often limited by manufacturing capabilities. We present here an adaptation of the Fourier Ptychography technique to a synchrotron-based full-field microscope (SHARP) operating at 13.5nm (EUV wavelength) and demonstrate 26nm coherent resolution on reflective samples, alongside with quantitative phase imaging which allows to characterize sub-nanometer substrate roughness.
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Antoine Wojdyla, Markus P. Benk, Kenneth A. Goldberg, and Patrick P. Naulleau "Fourier ptychography at short wavelength with a synchrotron-based microscope (Conference Presentation)", Proc. SPIE 10669, Computational Imaging III, 106690M (15 May 2018); https://doi.org/10.1117/12.2303447
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KEYWORDS
Microscopes
Extreme ultraviolet
Image resolution
Manufacturing
Phase imaging
Phase retrieval
Reflectivity
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