Automation of spectroellipsometric measurements within range of 1-4,9 eV by Beattie-Conn method

R. A. Ryskulov; A. Ya. Sribniy; Ye. R. Kovalevskyy; P. O. Kovanzhi; V. M. Prokopets; L. V. Poperenko

doi:10.1117/12.2309560

4 May 2018 Automation of spectroellipsometric measurements within range of 1-4,9 eV by Beattie-Conn method

R. A. Ryskulov, A. Ya. Sribniy, Ye. R. Kovalevskyy, P. O. Kovanzhi, V. M. Prokopets, L. V. Poperenko

Proceedings Volume 10672, Nanophotonics VII; 106724K (2018) https://doi.org/10.1117/12.2309560
Event: SPIE Photonics Europe, 2018, Strasbourg, France

Abstract

The spectroellipsometer based on DMR-4 spectrometer was automated. An electronic system and software for the automation of equipment was designed and built. The system was calibrated and for the purpose of verification of optical constants of metals samples such as gold, silver and copper were measured. The device automatically measures metal surfaces by Beattie-Conn method. It was measured values of optical constants of metal and compared them with table data. Graphs were built by experimental and table data, they demonstrate the results of measurements of metal samples coincided with theoretical data. Optical constants of surface based on heterostructures Cr_1,5nmAu_47nmHfO_{2_7nm} were measured by Beattie-Conn method too.

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R. A. Ryskulov, A. Ya. Sribniy, Ye. R. Kovalevskyy, P. O. Kovanzhi, V. M. Prokopets, and L. V. Poperenko "Automation of spectroellipsometric measurements within range of 1-4,9 eV by Beattie-Conn method", Proc. SPIE 10672, Nanophotonics VII, 106724K (4 May 2018); https://doi.org/10.1117/12.2309560

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