Size reduction of high-channel Si3N4 based AWG-spectrometer for medical applications

D. Seyringer; C. Burtscher; J. Edlinger; W. Drexler; E. Rank; P. Muellner; R. Hainberger; A. Maese-Novo; M. Vlaskovic; H. Zimmermann; J. Kraft; G. Koppitsch; M. Sagmeister; G. Meinhardt

doi:10.1117/12.2319670

19 September 2018 Size reduction of high-channel Si₃N₄ based AWG-spectrometer for medical applications

D. Seyringer, C. Burtscher, J. Edlinger, W. Drexler, E. Rank, P. Muellner, R. Hainberger, A. Maese-Novo, M. Vlaskovic, H. Zimmermann, J. Kraft, G. Koppitsch, M. Sagmeister, G. Meinhardt

Author Affiliations +

Proceedings Volume 10730, Nanoengineering: Fabrication, Properties, Optics, and Devices XV; 107300R (2018) https://doi.org/10.1117/12.2319670
Event: SPIE Nanoscience + Engineering, 2018, San Diego, California, United States

Abstract

In this paper we present the size reduction of a 160-channel, 50-GHz Si₃N₄based AWG-spectrometer. The spectrometer was designed for TM-polarized light with a central wavelength of 850 nm applying our proprietary “AWG-Parameters” tool. For the simulations of AWG layout, the PHASAR photonics tool from Optiwave was used. The simulated results show satisfying optical properties of the designed AWG-spectrometer. However, such high-channel count AWG features large size. To solve this problem we designed a special taper enabling the reduction of AWG structure by about 15%, while keeping the same optical properties. The technological verification of both AWG designs is also presented.

Conference Presentation

Citation Download Citation

D. Seyringer, C. Burtscher, J. Edlinger, W. Drexler, E. Rank, P. Muellner, R. Hainberger, A. Maese-Novo, M. Vlaskovic, H. Zimmermann, J. Kraft, G. Koppitsch, M. Sagmeister, and G. Meinhardt "Size reduction of high-channel Si₃N₄ based AWG-spectrometer for medical applications", Proc. SPIE 10730, Nanoengineering: Fabrication, Properties, Optics, and Devices XV, 107300R (19 September 2018); https://doi.org/10.1117/12.2319670

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