Development And Implementation Of A Laser-Induced Gold Deposition Technique For Repair Of Chromium Photomasks

A. J. Serafino; R. J. Coyle; R. Borutta; A. Kestenbaum; G. L. Wolk; R. F. Doll

doi:10.1117/12.953135

25 July 1989 Development And Implementation Of A Laser-Induced Gold Deposition Technique For Repair Of Chromium Photomasks

A. J. Serafino, R. J. Coyle, R. Borutta, A. Kestenbaum, G. L. Wolk, R. F. Doll

Author Affiliations +

Proceedings Volume 1088, Optical/Laser Microlithography II; (1989) https://doi.org/10.1117/12.953135
Event: 1989 Santa Clara Symposium on Microlithography, 1989, San Jose, CA, United States

Abstract

A method for repairing transparent defects in photomasks has been developed. We discuss the experimental development and integration of the process into a commercial repair system. The defect repair process makes use of a laser to initiate thermal decomposition of a mod-ified commercially available gold metallorganic ink. The ink is locally decomposed with a laser over the defect thereby forming an adherent opaque gold repair pad over the defect. Rectangular repair pads from lum to 25um on a side can be deposited with a single laser exposure of 5 seconds.

Citation Download Citation

A. J. Serafino, R. J. Coyle, R. Borutta, A. Kestenbaum, G. L. Wolk, and R. F. Doll "Development And Implementation Of A Laser-Induced Gold Deposition Technique For Repair Of Chromium Photomasks", Proc. SPIE 1088, Optical/Laser Microlithography II, (25 July 1989); https://doi.org/10.1117/12.953135

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available