Modifications of surface topography by acoustic resonance induced by laser ablation with ultrashort laser pulses

Gerhard Kunz; Alexander Kroschel; Tobias Menold; Andreas Michalowski; Mawuli Ametowobla

doi:10.1117/12.2508539

4 March 2019 Modifications of surface topography by acoustic resonance induced by laser ablation with ultrashort laser pulses

Gerhard Kunz, Alexander Kroschel, Tobias Menold, Andreas Michalowski, Mawuli Ametowobla

Author Affiliations +

Proceedings Volume 10905, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIV; 109050E (2019) https://doi.org/10.1117/12.2508539
Event: SPIE LASE, 2019, San Francisco, California, United States

Abstract

Scanning ultra-short pulse laser ablation is a very flexible technology that can be used for the subtractive manufacturing of complex three-dimensional structures with precision requirements on micrometer level. In our studies, inadvertent periodic deviations at the bottom of ablated cavities in silicon were observed after laser ablation with ultra-short laser pulses. We introduce the hypothesis of an interdependency between the ablation process and ultrasonic resonant acoustic waves, also known as standing waves, forming in the air within the ablated volume. Using basic acoustic wave equations, the corresponding periodicity of the deviations at the bottom surface of the cavities is described with good agreement to our experimental data.

Conference Presentation

Citation Download Citation

Gerhard Kunz, Alexander Kroschel, Tobias Menold, Andreas Michalowski, and Mawuli Ametowobla "Modifications of surface topography by acoustic resonance induced by laser ablation with ultrashort laser pulses", Proc. SPIE 10905, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIV, 109050E (4 March 2019); https://doi.org/10.1117/12.2508539

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