A highly linear piezoelectric quasi-static MEMS mirror with mechanical tilt angles of larger than 10°

S. Gu-Stoppel; T. Lisec; S. Fichtner; N. Funck; C. Eisermann; F. Lofink; B. Wagner; A. Müller-Groeling

doi:10.1117/12.2509577

4 March 2019 A highly linear piezoelectric quasi-static MEMS mirror with mechanical tilt angles of larger than 10°

S. Gu-Stoppel, T. Lisec, S. Fichtner, N. Funck, C. Eisermann, F. Lofink, B. Wagner, A. Müller-Groeling

Proceedings Volume 10931, MOEMS and Miniaturized Systems XVIII; 1093102 (2019) https://doi.org/10.1117/12.2509577
Event: SPIE OPTO, 2019, San Francisco, California, United States

Abstract

This paper presents a new type of piezoelectric quasi-static mirror, which utilizes a three-level-construction comprising a mirror plate (diameter = 0.8 mm), a pillar and four actuators hidden beneath the mirror plate, reducing the chip size to 1.3 mm² . Special folded springs connecting the pillar and actuators are applied to reduce the mechanical non-linearity. Moreover, the newly developed piezoelectric material AlScN delivers large force enabling a mechanical tilting angle of ±12.5° at 150 VDC, as well as benefits like great linearity, repeatability and long-term stability. No angle change larger than 0.02° was observed during 100 on-and-off switching circles with 5 s intervals under 100 VDC. Long-term test over 76 hours under 100 VDC has shown maximum 0.1°shift. More precise measurements are ongoing. Based on the great linearity a simple closed-loop-control has also been developed and more results will be presented in the near future.

Conference Presentation

Citation Download Citation

S. Gu-Stoppel, T. Lisec, S. Fichtner, N. Funck, C. Eisermann, F. Lofink, B. Wagner, and A. Müller-Groeling "A highly linear piezoelectric quasi-static MEMS mirror with mechanical tilt angles of larger than 10°", Proc. SPIE 10931, MOEMS and Miniaturized Systems XVIII, 1093102 (4 March 2019); https://doi.org/10.1117/12.2509577

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