Miniaturization and batch fabrication of two-axis water-immersible scanning mirrors

Song Xu; Suangliang Li; Jun Zou

doi:10.1117/12.2507317

4 March 2019 Miniaturization and batch fabrication of two-axis water-immersible scanning mirrors

Song Xu, Suangliang Li, Jun Zou

Proceedings Volume 10931, MOEMS and Miniaturized Systems XVIII; 109310M (2019) https://doi.org/10.1117/12.2507317
Event: SPIE OPTO, 2019, San Francisco, California, United States

Abstract

This paper reports a new micromachined two-axis water-immersible micro scanning mirror using BoPET (biaxiallyoriented polyethylene terephthalate) hinges. A new fabrication process based on lithography, wafer-bonding, and reactive ion etching on a hybrid silicon-polymer substrate was developed to enable high-resolution patterning, miniaturization and also batch fabrication capability. For demonstration, a prototype scanning mirror was designed, fabricated and tested. Its overall size was reduced to 5×5×5 mm³, which is comparable to that of a typical siliconbased micro scanning mirror. The testing results show good raster scanning performance. This approach could enable the miniaturization and batch fabrication of water-immersible scanning mirrors for different scanning optical and acoustic imaging applications in liquid environments.

Conference Presentation

Citation Download Citation

Song Xu, Suangliang Li, and Jun Zou "Miniaturization and batch fabrication of two-axis water-immersible scanning mirrors", Proc. SPIE 10931, MOEMS and Miniaturized Systems XVIII, 109310M (4 March 2019); https://doi.org/10.1117/12.2507317

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available