VIS Fabry-Pérot Interferometer with structured (TiO2/PE-SiO2)³ Bragg-reflectors on 5mm large LP-Si3N4 membranes

Christian Helke; Karla Hiller; Jan Seiler; Thomas Werner; Marco Meinig; Steffen Kurth; Thomas Otto

doi:10.1117/12.2509170

4 March 2019 VIS Fabry-Pérot Interferometer with structured (TiO₂/PE-SiO₂)³ Bragg-reflectors on 5mm large LP-Si₃N₄ membranes

Christian Helke, Karla Hiller, Jan Seiler, Thomas Werner, Marco Meinig, Steffen Kurth, Thomas Otto

Author Affiliations +

Proceedings Volume 10931, MOEMS and Miniaturized Systems XVIII; 109310Q (2019) https://doi.org/10.1117/12.2509170
Event: SPIE OPTO, 2019, San Francisco, California, United States

Abstract

Miniaturized spectrometry systems are achievable e.g. by the use of MEMS based tunable Fabry-Pérot Interferometers (FPI) as wavelength selective filter elements. Main part of a FPI is the reflector which is usually realized as a stack of alternating dielectric layers with high and low refractive index. To achieve high reflectance layer stacks with larger number of layers and/or layers with a higher refractive index contrast are needed. Both have to be integrated within the manufacturing processes chain which in practice proves to be a difficult process.

We present a FPI with a (TiO₂/SiO₂)³ reflector stack with a reflectance of 97 % and TiO₂ as high refractive index layer for the use in the VIS-range of 555 nm to 585 nm. Main achievements of TiO₂ instead of Si₃N₄ are a higher reflectance and a minimized reflector complexity. Furthermore, we introduce a dry etch process which is compatible and integrated in the manufacturing process chain of the MEMS FPI.

Manufacturing of the 7.5 mm x 7.5 mm chip size FPI is done on 6" wafers consisting of a moveable reflector on a 210 nm thin and 5 mm in diameter LP-Si₃N₄ membrane and a fixed reflector with an aperture of 2 mm in diameter. The measured peak transmittance is between 28 % and 37 % with a FWHM bandwidth between 1.5 nm and 1.8 nm. It could be shown that the FPIs are tunable over the spectral range from 555 nm to 585 nm with a maximum control voltage of 45 V using the 18th interference order.

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Christian Helke, Karla Hiller, Jan Seiler, Thomas Werner, Marco Meinig, Steffen Kurth, and Thomas Otto "VIS Fabry-Pérot Interferometer with structured (TiO₂/PE-SiO₂)³ Bragg-reflectors on 5mm large LP-Si₃N₄ membranes", Proc. SPIE 10931, MOEMS and Miniaturized Systems XVIII, 109310Q (4 March 2019); https://doi.org/10.1117/12.2509170

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