Modeling of dynamic image performance for lithographic projection lens

Zhiyong Yang; Yating Shi; Hao Jiang; Shiyuan Liu

doi:10.1117/12.2515342

20 March 2019 Modeling of dynamic image performance for lithographic projection lens

Zhiyong Yang, Yating Shi, Hao Jiang, Shiyuan Liu

Proceedings Volume 10961, Optical Microlithography XXXII; 109610V (2019) https://doi.org/10.1117/12.2515342
Event: SPIE Advanced Lithography, 2019, San Jose, California, United States

Abstract

As critical dimension shrinks, the image quality of lithographic projection lens is improved gradually. In lithographic tool, vibration is an important factor affecting the image quality of projection lens. The internal vibration of projection lens will change the relative position between the lens elements, reduce the image contrast and process window. There are usually two methods to suppress the internal vibration of lithographic projection lens, isolating the external vibration source and improving the stiffness of the internal structure. Based on the above methods, this paper proposes a dynamic imaging model (DIM) that establishes a precise quantitative relationship between the internal vibration of projection lens and the imaging contrast. The DIM has been used in image performance analysis and the structure design for lithographic projection lens.

Citation Download Citation

Zhiyong Yang, Yating Shi, Hao Jiang, and Shiyuan Liu "Modeling of dynamic image performance for lithographic projection lens", Proc. SPIE 10961, Optical Microlithography XXXII, 109610V (20 March 2019); https://doi.org/10.1117/12.2515342

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