Study of the internal hollow structures fabricated with two typical femtosecond laser systems and their respective applications

Chong Zheng; Ziqi Feng; Tao Chen; Anming Hu; Shibing Liu; Junwei Li

doi:10.1117/12.2506538

15 November 2018 Study of the internal hollow structures fabricated with two typical femtosecond laser systems and their respective applications

Chong Zheng, Ziqi Feng, Tao Chen, Anming Hu, Shibing Liu, Junwei Li

Author Affiliations +

Proceedings Volume 10964, Tenth International Conference on Information Optics and Photonics; 109646I (2018) https://doi.org/10.1117/12.2506538
Event: Tenth International Conference on Information Optics and Photonics (CIOP 2018), 2018, Beijing, China

Abstract

Femtosecond (fs) laser is proved a powerful tool in the field of 3-dimensional internal micromachining inside the transparent dielectrics. There are already many types of femtosecond laser systems widely applied nowadays, among which Ti: sapphire femtosecond laser and femtosecond fiber laser are the two most frequently used typical femtosecond laser systems. However, according to our study, the differences in the laser parameters between these two femtosecond laser systems may induce significant discrepancy in manufacturing internal hollow structures inside the polymethyl methacrylate (PMMA) substrate. The experimental results show that when a 65fs laser beam is focused inside the PMMA substrate and scans a route of a straight line at an average power of 1.5W and 1 kHz repetition rate, a hollow microchannel is successfully fabricated and no melted region is found around the microchannel. However, if the PMMA substrate is constantly irradiated with the 1.5W laser pulses that generated by a 400fs femtosecond fiber laser system at a repetition rate of 100 kHz, a growing hollow cavity is observed and a melted-resolidified region is formed around the cavity. According to the numerical simulation of heat accumulation effect, we explain the ‘heat accumulation effect’ caused in the femtosecond fiber laser manufacturing and the ‘cold processing property’ of the Ti: sapphire femtosecond laser processing, respectively. These experimental and numerical results may broaden the understanding of thermal effect during the process of the femtosecond laser micromachining and provides more opportunities in the manufacturing of polymeric integrated microfluidic chip with laser direct writing technology in the future.

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Chong Zheng, Ziqi Feng, Tao Chen, Anming Hu, Shibing Liu, and Junwei Li "Study of the internal hollow structures fabricated with two typical femtosecond laser systems and their respective applications", Proc. SPIE 10964, Tenth International Conference on Information Optics and Photonics, 109646I (15 November 2018); https://doi.org/10.1117/12.2506538

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KEYWORDS

Femtosecond phenomena

Polymethylmethacrylate

Laser systems engineering

Manufacturing

Thermal effects

Microfluidics

Femtosecond fiber lasers

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