Reducing uncertainty of standard reference ring measurement up to 50 nm by means of non-contact method

Ardi Rahman; Andrew Mosckalev

doi:10.1117/12.2520381

14 April 2019 Reducing uncertainty of standard reference ring measurement up to 50 nm by means of non-contact method

Ardi Rahman, Andrew Mosckalev

Proceedings Volume 11028, Optical Sensors 2019; 110281H (2019) https://doi.org/10.1117/12.2520381
Event: SPIE Optics + Optoelectronics, 2019, Prague, Czech Republic

Abstract

Standard reference ring is high accuracy internal diameter artifact which is used as calibration standard in calibration laboratories and industrial facilities. The national metrology institute (NMI) has the task of guaranteeing traceability of measurements within the country with the highest accuracy. All NMIs coordinate with bureau international des poids et mesures (BIPM) to get recognition of calibration and measurement capabilities (CMC). According to the BIPM database (www.kcdb.bipm.org), only 35 of 157 countries have CMC of internal diameter measurement, while 93% of them have uncertaintiy values above 100 nm. This fact shows unequality of measuring capabilities among the countries in the world. To face the issues, this work has done to fullfill the needs on high accuracy internal diameter measurement. Noncontact method is well known as high-accuracy measurement method instead of contact method. The use of optical probe excludes such effect as the deformation of the artifacts and the mechanical probe diameter effect as well. Another thing that we improve is usage of He-Ne laser stabilized with I2 measurement system to increase the accuracy and to reduce the uncertainty. This research explained the uncertainty sources of the method applied and the efforts that has done to reduce it to 50 nm. Finally, this research is very useful for industry, research institutions and the practitioners of metrology at NMIs to improve their internal diameter measurement system accuracy.

Citation Download Citation

Ardi Rahman and Andrew Mosckalev "Reducing uncertainty of standard reference ring measurement up to 50 nm by means of non-contact method", Proc. SPIE 11028, Optical Sensors 2019, 110281H (14 April 2019); https://doi.org/10.1117/12.2520381

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