Actinic damage of Y/Mo multilayer Bragg optics in a tabletop extreme ultraviolet laser

Davide Bleiner

doi:10.1117/12.2520899

24 April 2019 Actinic damage of Y/Mo multilayer Bragg optics in a tabletop extreme ultraviolet laser

Davide Bleiner

Proceedings Volume 11035, Optics Damage and Materials Processing by EUV/X-ray Radiation VII; 110350J (2019) https://doi.org/10.1117/12.2520899
Event: SPIE Optics + Optoelectronics, 2019, Prague, Czech Republic

Abstract

Actinic irradiation (i.e. using ionizing light) of EUV pulses on a multilayer Bragg optics was investigated for characterizing the chemical effects. Photothermal effects are ruled out by the low repetition rate and low absolute energy of the EUV pulses. This would exclude the formation of melt-related particles, which have been however observed. Alternative explanations are discussed. The analysis concentrate on the structure and composition of the multilayer stack, with the aim of quantifying the kinetics.

Conference Presentation

Citation Download Citation

Davide Bleiner "Actinic damage of Y/Mo multilayer Bragg optics in a tabletop extreme ultraviolet laser", Proc. SPIE 11035, Optics Damage and Materials Processing by EUV/X-ray Radiation VII, 110350J (24 April 2019); https://doi.org/10.1117/12.2520899

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