Paper
14 February 2019 Demonstration of broadband chirped grating couplers for MPW fabrication
Author Affiliations +
Proceedings Volume 11048, 17th International Conference on Optical Communications and Networks (ICOCN2018); 110482R (2019) https://doi.org/10.1117/12.2519448
Event: 17th International Conference on Optical Communications and Networks (ICOCN2018), 2018, Zhuhai, China
Abstract
We demonstrate a broadband grating couplers which can be fabricated on SOI by MPW process. By using chirped grating coupler, broad-bandwidth of 78 nm with 1 dB insertion and 130 nm with 3 dB insertion are achieved.
© (2019) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Wenyu Li, Jifang Qiu, Ye Tian, Zhenli Dong, Zexin Yu, Hongxiang Guo, and Jian Wu "Demonstration of broadband chirped grating couplers for MPW fabrication", Proc. SPIE 11048, 17th International Conference on Optical Communications and Networks (ICOCN2018), 110482R (14 February 2019); https://doi.org/10.1117/12.2519448
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KEYWORDS
Silicon

Waveguides

Etching

Optical design

Single mode fibers

Diffraction gratings

Integrated optics

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