Control circuit design of magnetic suspension stylus measuring instrument

Jianfei Zhou; Suping Chang; Chunbing Hu; Hao Wu; Zhongyu Zhang

doi:10.1117/12.2511252

7 March 2019 Control circuit design of magnetic suspension stylus measuring instrument

Jianfei Zhou, Suping Chang, Chunbing Hu, Hao Wu, Zhongyu Zhang

Proceedings Volume 11053, Tenth International Symposium on Precision Engineering Measurements and Instrumentation; 1105316 (2019) https://doi.org/10.1117/12.2511252
Event: 10th International Symposium on Precision Engineering Measurements and Instrumentation (ISPEMI 2018), 2018, Kunming, China

Abstract

During the measurement,The traditional lever type measuring instrument will introduce a nonlinear error due to the rotation of the lever, which will affect the measurement result.A magnetic levitation stylus measuring instrument was designed based on it. It changed the lever supporting mode from the stylus shaft to the vertical direction linear translation which can eliminate the nonlinear error and improve the measurement accuracy.This paper introduces the measuring principle based on the magnetic levitation bearing stylus surface topography sensor, designs the electronic control system of the magnetic levitation contact measuring instrument, and finally conducts the surface topography measurement test.The experimental results show that the designed electronic control system can meet the design requirements of the magnetic levitation system.

Citation Download Citation

Jianfei Zhou, Suping Chang, Chunbing Hu, Hao Wu, and Zhongyu Zhang "Control circuit design of magnetic suspension stylus measuring instrument", Proc. SPIE 11053, Tenth International Symposium on Precision Engineering Measurements and Instrumentation, 1105316 (7 March 2019); https://doi.org/10.1117/12.2511252

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