Time encoded chromatic confocal microscopy for wide field 3D surface profiling

Se Jin Park; Hansol Jang; Chang-Seok Kim

doi:10.1117/12.2527002

22 July 2019 Time encoded chromatic confocal microscopy for wide field 3D surface profiling

Se Jin Park, Hansol Jang, Chang-Seok Kim

Proceedings Volume 11076, Advances in Microscopic Imaging II; 110761P (2019) https://doi.org/10.1117/12.2527002
Event: European Conferences on Biomedical Optics, 2019, Munich, Germany

Abstract

We propose a fast surface profiling measurement method using a color confocal microscope based on time-encoded spectroscopy. The chromatic confocal microscopy can acquire depth information at high speed because it does not require depth scanning. On the other hand, in chromatic confocal microscopy, depth information is obtained through the wavelength of the reflected light, which is difficult for wide field imaging. By applying time encoded spectroscopy technology, depth information can be obtained at high speed through time information of reflected light. As a result, we could obtain the 3D surface shape without scanning by measuring the reflected light through the CCD over time.

Citation Download Citation

Se Jin Park, Hansol Jang, and Chang-Seok Kim "Time encoded chromatic confocal microscopy for wide field 3D surface profiling", Proc. SPIE 11076, Advances in Microscopic Imaging II, 110761P (22 July 2019); https://doi.org/10.1117/12.2527002

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