Hybrid integration of active semiconductor devices with passive micro/nano optical structures for emerging applications

Yeyu Zhu; Siwei Zeng; Yunsong Zhao; Lin Zhu

doi:10.1117/12.2528913

3 September 2019 Hybrid integration of active semiconductor devices with passive micro/nano optical structures for emerging applications

Yeyu Zhu, Siwei Zeng, Yunsong Zhao, Lin Zhu

Author Affiliations +

Proceedings Volume 11089, Nanoengineering: Fabrication, Properties, Optics, Thin Films, and Devices XVI; 1108908 (2019) https://doi.org/10.1117/12.2528913
Event: SPIE Nanoscience + Engineering, 2019, San Diego, California, United States

Abstract

We show a fully integrated, coherently combined laser system in the InP-Si₃N₄ hybrid platform. Coherent combining of two InP-based gain chips is obtained with a combining efficiency of ~92%. Besides, we demonstrate narrow-linewidth, tunable diode lasers in InP/GaAs-Si₃N₄ platform. The Si₃N₄ photonic integrated circuit performs as a tunable external cavity for both InP and GaAs gain chips simultaneously. Single frequency lasing at 1.55 and 1 um is simultaneously obtained on a single chip with the spectral linewidths of 18-kHz and 70-kHz respectively. We also obtain wide-angle beam steering by using the wide wavelength tuning range provided by dual-band diode lasers.

Conference Presentation

Citation Download Citation

Yeyu Zhu, Siwei Zeng, Yunsong Zhao, and Lin Zhu "Hybrid integration of active semiconductor devices with passive micro/nano optical structures for emerging applications", Proc. SPIE 11089, Nanoengineering: Fabrication, Properties, Optics, Thin Films, and Devices XVI, 1108908 (3 September 2019); https://doi.org/10.1117/12.2528913

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