Measurement of patterned surfaces with non-fluorescent structured illumination microscope

S. Usuki; G. Shibata; Kenjiro T. Miura

doi:10.1117/12.2529023

3 September 2019 Measurement of patterned surfaces with non-fluorescent structured illumination microscope

S. Usuki, G. Shibata, Kenjiro T. Miura

Proceedings Volume 11102, Applied Optical Metrology III; 111021L (2019) https://doi.org/10.1117/12.2529023
Event: SPIE Optical Engineering + Applications, 2019, San Diego, California, United States

Abstract

Patterned surfaces which include semiconductor devices, optical components and other functional surfaces play important role in recent manufacturing. Optical measurements with non-destructive property is available for them but further improvement in spatial resolution and throughput are necessary. In this study, structured illumination microscopy was employed for high-resolution wide-field measurement. Structured illumination microscopy has been usually applied for fluorescent bio-imaging. For non-fluorescent imaging and industrial applications, one problem is speckle noise in structured illumination generation and another problem is vibration and thermal drift in high-precision positioning of laser-interference standing-wave illumination. In our development, the phase of the structured illumination is detected as a fringe signal with another interferometric measurement system, which is employed by structured illumination microscopy as originally developed; it uses a low-coherence light source for high-resolution and low-speckle imaging. We constructed an optical system consisting of plural Michelson interferometers, which allow the low-coherence interference fringes to be manipulated on a sample and the phase to be detected on another sensor. Feeding back the phase of structured illumination through super-resolution processing allows robust imaging despite vibrations, drifting, and environmental changes. A series of experiments were performed to verify our developed microscope system applied for measurement of patterned surfaces.

Citation Download Citation

S. Usuki, G. Shibata, and Kenjiro T. Miura "Measurement of patterned surfaces with non-fluorescent structured illumination microscope", Proc. SPIE 11102, Applied Optical Metrology III, 111021L (3 September 2019); https://doi.org/10.1117/12.2529023

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KEYWORDS

Microscopy

Image processing

Microscopes

Diffraction

Image resolution

Imaging systems

Light sources

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