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One of solutions to develop an energy resolved X-ray imager with sub-100μm pixel pitch is introduced. It consists of a small readout circuit and a data compressor in pixel. To realize spectroscopic readout circuit, charge counting architecture is adopted. And it equips time independence by removing transient response in analog signal processing and detector independence by controllability of time of signal processing for one pulse. An LSI implementing this system has been developed with 0.18um CMOS process. The pixel pitch is 80um and each pixel has 15 energy thresholds. The behavior of readout X-ray photon’s energy and data compression for photon-counting imaging has been verified by using CdTe detector. Furthermore, supporting other detectors such as TlBr and other energy weighting function than photon-counting are progressing.
Katsuyuki Takagi,Toshiyuki Takagi,Tsuyoshi Terao,Hisashi Morii,Akifumi Koike, andToru Aoki
"Charge counting readout LSI for x-ray imaging and its applications", Proc. SPIE 11114, Hard X-Ray, Gamma-Ray, and Neutron Detector Physics XXI, 111140G (9 September 2019); https://doi.org/10.1117/12.2529747
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