Micro-ring resonator optical sensor based on silicon and silicon nitride waveguide

Jinsheng Ni; Mingyu Li; Jianjun He; Chang Su

doi:10.1117/12.2533464

17 May 2019 Micro-ring resonator optical sensor based on silicon and silicon nitride waveguide

Jinsheng Ni, Mingyu Li, Jianjun He, Chang Su

Proceedings Volume 11170, 14th National Conference on Laser Technology and Optoelectronics (LTO 2019); 111701Q (2019) https://doi.org/10.1117/12.2533464
Event: Fourteenth National Conference on Laser Technology and Optoelectronics, 2019, Shanghai, China

Abstract

In this paper, we compare the sensing sensitivity, the stability and the temperature sensitivity of the micro-ring resonator optical sensor based on silicon waveguide and silicon nitride waveguide. For the silicon waveguide and silicon nitride waveguide single ring, the sensing sensitivities are 1113nm/RIU and 182.64nm/RIU, the resonance wavelength variations are ±12.5pm and ±7.5pm in an hour testing at the ambient temperature and the temperature sensitivities are 0.038nm/K and 0.018nm/K, respectively. . The sensing sensitivity can be improved to 6080.6nm/RIU by cascaded double silicon nitride waveguide rings to produce Vernier effect.

Citation Download Citation

Jinsheng Ni, Mingyu Li, Jianjun He, and Chang Su "Micro-ring resonator optical sensor based on silicon and silicon nitride waveguide", Proc. SPIE 11170, 14th National Conference on Laser Technology and Optoelectronics (LTO 2019), 111701Q (17 May 2019); https://doi.org/10.1117/12.2533464

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
5 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Waveguides

Silicon

Microrings

Resonators

Sensors

Optical sensors

Photonic integrated circuits

Keywords/Phrases

Search In:

Publication Years