Next generation of a linear chirped slope profile fabricated by plasma jet machining

Heike Müller; Georg Böhm; Thomas Arnold

doi:10.1117/12.2526746

28 June 2019 Next generation of a linear chirped slope profile fabricated by plasma jet machining

Heike Müller, Georg Böhm, Thomas Arnold

Proceedings Volume 11171, Sixth European Seminar on Precision Optics Manufacturing; 111710A (2019) https://doi.org/10.1117/12.2526746
Event: Sixth European Seminar on Precision Optics Manufacturing, 2019, Teisnach, Germany

Abstract

Plasma Jet Machining is an established process in ultra-precision surface manufacturing. Removal of several nanometers up to millimeters can be achieved using the atmospheric pressure reactive plasma jet as a non-mechanical tool. Surface form measuring techniques have to be improved equally, to further enhance the deterministic machining. Exact knowledge of the instrument transfer function is necessary to distinguish measurement artefacts and reliable measurement results. Precise sinusoidal surface structures prepared by plasma jet etching can be used as calibration elements to determine the instrument transfer function, e.g. slope-measuring devices like Nanometer Optical component measuring Machine (NOM). The steps for manufacturing such calibration elements including theoretical considerations, adjustment of the plasma jet parameters and implementations on different substrates are presented. Finally, a chirped sinusoidal structure on a singlecrystalline silicon slab is fabricated.

Citation Download Citation

Heike Müller, Georg Böhm, and Thomas Arnold "Next generation of a linear chirped slope profile fabricated by plasma jet machining", Proc. SPIE 11171, Sixth European Seminar on Precision Optics Manufacturing, 111710A (28 June 2019); https://doi.org/10.1117/12.2526746

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