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We describe a novel dynamic spectroscopic ellipsometer and its advanced imaging spectro-ellipsometric scheme based on one-piece polarizing interferometric module. The proposed dynamic spectroscopic ellipsometer requires neither moving parts nor time dependent polarization modulation for extracting spectroscopic ellipsometric parameters. By employing a snapshot single spectral data, we reconstruct spatially resolved spectral ellipsometric information of ultrathin films coated on a freeform surface with high precision and accuracy. The dynamic measurement capability of the proposed imaging spectro-ellipsometer is demonstrated for large-scale periodic nano-patterns fabricated on roll surface.
Daesuk Kim andVamara Dembele
"Large-scale freeform surface ultra-thin film coating uniformity measurement based on a dynamic spectroscopic ellipsometer", Proc. SPIE 11175, Optifab 2019, 111751L (15 November 2019); https://doi.org/10.1117/12.2536978
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Daesuk Kim, Vamara Dembele, "Large-scale freeform surface ultra-thin film coating uniformity measurement based on a dynamic spectroscopic ellipsometer," Proc. SPIE 11175, Optifab 2019, 111751L (15 November 2019); https://doi.org/10.1117/12.2536978