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In this paper, we propose a method for measuring the angular coordinate error of the circular laser writing systems based on laser interferometry. The method includes writing special test samples and their subsequent control using a conventional Fizeau interferometer. The angular coordinate error is calculated from the phase map. This method allows detecting errors of the angular coordinates up to 1-2 ang. sec. The test pattern can also be written on the same substrate within a single fabrication process with main pattern. This allows certification and quality control of the fabricated diffractive optical element. In addition, laser writing system can be periodically tested to verify that angular coordinate error is within acceptable limits. The method described in article can be extended to any writing system operating in the polar coordinate system. |
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Laser systems engineering
Fizeau interferometers
Diffractive optical elements
Laser interferometry
Optical fabrication equipment
Error analysis
Optical components
