Investigation Of Surface Shapes Using A Carrier Frequency Based Analysing System

G. Frankowski; I. Stobbe; W. Tischer; F. Schillke

doi:10.1117/12.961254

3 April 1989 Investigation Of Surface Shapes Using A Carrier Frequency Based Analysing System

G. Frankowski, I. Stobbe, W. Tischer, F. Schillke

Proceedings Volume 1121, Interferometry '89; (1989) https://doi.org/10.1117/12.961254
Event: Interferometry '89, 1989, Warsaw, Poland

Abstract

A basic requirement in applying interferometrical methods to measurement, testing and inspection is to evaluate the phase differences between the interfering waves very quickly and with high accuracy. Different methods and equipments to phase detection and evaluation in interferometry have been published during the last years. The aim of this paper now is to present theoretical and experimental results to apply so-called carrier frequency techniques for determining phase differences in interferometry.

Citation Download Citation

G. Frankowski, I. Stobbe, W. Tischer, and F. Schillke "Investigation Of Surface Shapes Using A Carrier Frequency Based Analysing System", Proc. SPIE 1121, Interferometry '89, (3 April 1989); https://doi.org/10.1117/12.961254

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