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Prototyping of van der Waals materials on dense nanophotonic devices requires high-precision
monolayer discrimination to avoid bulk material contamination. We use the glass transition temperature of polycarbonate, used in the standard dry transfer process, to draw an
in situ point for the precise pickup of two dimensional materials. We transfer transition
metal dichalcogenide monolayers onto a large-area silicon nitride spiral waveguide and silicon nitride ring resonators to demonstrate the high-precision contamination-free nature of
the modified dry transfer method.
David Rosser
"High-precision local transfer of van der Waals materials on nanophotonic structures (Conference Presentation)", Proc. SPIE 11282, 2D Photonic Materials and Devices III, 112820I (10 March 2020); https://doi.org/10.1117/12.2543902
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David Rosser, "High-precision local transfer of van der Waals materials on nanophotonic structures (Conference Presentation)," Proc. SPIE 11282, 2D Photonic Materials and Devices III, 112820I (10 March 2020); https://doi.org/10.1117/12.2543902