Coupled MOEMS membranes for enhanced sensing purposes

Andreas Naesby Rasmussen; Sepideh Naserbakht; Aurélien Dantan

doi:10.1117/12.2553523

28 February 2020 Coupled MOEMS membranes for enhanced sensing purposes

Andreas Naesby Rasmussen, Sepideh Naserbakht, Aurélien Dantan

Proceedings Volume 11293, MOEMS and Miniaturized Systems XIX; 112930X (2020) https://doi.org/10.1117/12.2553523
Event: SPIE OPTO, 2020, San Francisco, California, United States

Abstract

The electromechanical actuation of two silicon nitride membranes forming a monolithic MOEMS is investigated. By controlling the tensile stress of the high quality membranes via a piezoelectrically controlled compressive force applied to the chip we demonstrate tuning of their mechanical spectrum, as well as strong intermode electromechanical coupling. Piezoelectric actuation is shown to enhance the nonlinear response of the membranes, which is evidenced by parametric amplification of the thermal fluctuations. Such a MOEMS array represents an attractive tunable and versatile platform for optomechanics and sensing applications.

Citation Download Citation

Andreas Naesby Rasmussen, Sepideh Naserbakht, and Aurélien Dantan "Coupled MOEMS membranes for enhanced sensing purposes", Proc. SPIE 11293, MOEMS and Miniaturized Systems XIX, 112930X (28 February 2020); https://doi.org/10.1117/12.2553523

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