3D mesostructures from 2D lithographically defined precursors (Conference Presentation)

John A. Rogers

doi:10.1117/12.2555050

24 March 2020 3D mesostructures from 2D lithographically defined precursors (Conference Presentation)

John A. Rogers

Author Affiliations +

Proceedings Volume 11324, Novel Patterning Technologies for Semiconductors, MEMS/NEMS and MOEMS 2020; 1132403 (2020) https://doi.org/10.1117/12.2555050
Event: SPIE Advanced Lithography, 2020, San Jose, California, United States

Abstract

Complex, three dimensional (3D) assemblies of nanomaterials provide sophisticated, essential functions in even the most basic forms of life. Compelling opportunities exist for analogous 3D structures in man-made devices, but design options are highly constrained by capabilities in fabrication and growth that are primitive compared to those found in biology. This talk describes a collection of recently developed routes to 3D mesostructures that rely on geometric transformation of lithographically defined two dimensional (2D) precursor micro/nanostructures by controlled processes of compressive buckling. We review the key concepts, and highlight some example applications at the bio-interface.

Conference Presentation

Citation Download Citation

John A. Rogers "3D mesostructures from 2D lithographically defined precursors (Conference Presentation)", Proc. SPIE 11324, Novel Patterning Technologies for Semiconductors, MEMS/NEMS and MOEMS 2020, 1132403 (24 March 2020); https://doi.org/10.1117/12.2555050

Access the abstract

PROCEEDINGS
PRESENTATION

WATCH
PRESENTATION SAVE TO MY LIBRARY

GET CITATION

Subscribe to Digital Library

Receive Erratum Email Alert

Keywords/Phrases

Search In:

Publication Years