In this work we explore the idea of implementing zone melting on a micrometer scale by localized heating induced by focused electron beam irradiation. The model structure is a thin metallic stripe on a quartz substrate. The peak temperature and the temperature profile around the heated zone are evaluated by finite element simulations. The results show that the molten zone is narrow but when it is at the end of the stripe, the peak temperature increases. This effect was compensated by introducing heatsinks with optimized size. Proof- of-concept experiments were performed on the optimized structures in a scanning electron microscope (SEM) modified for operation with a higher beam current. |
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Electron beams
Scanning electron microscopy
Gold
Surface roughness
Plasmonics
Electron beam lithography
Lithography