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This paper highlights the optimization of Deep Rib High Speed Phase Modulators for 400G applications thanks to the optimal choice of structure and implants through a Design Of Experiment analysis, including the proposal of a new Deep Rib HSPM with Z-implants. Results show 1,6dB gain in OMA (Optical Modulation of Amplitude) at the same cutoff frequency (fc=[2Pi*RC]-1) compared to the previous generation [1] with optimized vertical implants, and up to 2,15dB gain vs [1] with the new Z-implant Deep Rib device.
S. Monfray,S. Cremer,N. Vulliet,E. Dubois,F. Domengie ,S. Jan,F. Baille, andF. Boeuf
"Optimization of deep rib high speed phase modulators on 300mm industrial Si-photonics platform", Proc. SPIE 11364, Integrated Photonics Platforms: Fundamental Research, Manufacturing and Applications, 1136403 (2 April 2020); https://doi.org/10.1117/12.2554725
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S. Monfray, S. Cremer, N. Vulliet, E. Dubois, F. Domengie , S. Jan, F. Baille, F. Boeuf, "Optimization of deep rib high speed phase modulators on 300mm industrial Si-photonics platform," Proc. SPIE 11364, Integrated Photonics Platforms: Fundamental Research, Manufacturing and Applications, 1136403 (2 April 2020); https://doi.org/10.1117/12.2554725