Novel synthesis and design methods of optical thin film structures using vanadium dioxide phase change material

Andrew M. Sarangan

doi:10.1117/12.2535617

6 December 2019 Novel synthesis and design methods of optical thin film structures using vanadium dioxide phase change material

Andrew M. Sarangan

Author Affiliations +

Proceedings Volume 11371, International Workshop on Thin Films for Electronics, Electro-Optics, Energy, and Sensors 2019; 1137109 (2019) https://doi.org/10.1117/12.2535617
Event: International Workshop on Thin Films for Electronics, Electro-Optics, Energy and Sensors, 2019, Reykjavik, Iceland

Abstract

Recent developments in phase change materials have led to a new generation of electronic and photonic memory devices and thermally tunable devices. Vanadium dioxide (VO₂) and Germanium Antimoy Telluride (GST) are two of the most developed phase change materials. The focus of this work is on vanadium dioxide. Current methods of growing vanadium dioxide rely on reactive physical vapor deposition on heated and lattice-matched substrates. This is often a difficult deposition process with a very narrow process window. The high process tem- peratures, patterning and etching challenges, and the lattice-matching requirement severely limit the number of materials VO₂ can co-exist with. As a result, compared to other types of inorganic optical thin film materials, the development of practical devices exploiting VO₂ has been modest. In this paper, novel and simplified approaches to producing VO₂ thin films is discussed, especially in regards to creating multilayer optical structures, tunable optical filters, switchable wiregrid polarizers, and tunable Bragg reflectors. The growth and characterization of nanostructured VO₂ films are also discussed.

Citation Download Citation

Andrew M. Sarangan "Novel synthesis and design methods of optical thin film structures using vanadium dioxide phase change material", Proc. SPIE 11371, International Workshop on Thin Films for Electronics, Electro-Optics, Energy, and Sensors 2019, 1137109 (6 December 2019); https://doi.org/10.1117/12.2535617

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
6 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Vanadium

Sapphire

Thin films

Reflectivity

Thermal oxidation

Refractive index

Optical design

Show All Keywords

Keywords/Phrases

Search In:

Publication Years