Similarity evaluation of 3D topological measurement results using statistical methods (Rising Researcher)

Vignesh Suresh; Yi Zheng; Xiao Zhang; Shaodong Wang; Hantang Qin; Qing Li; Beiwen Li

doi:10.1117/12.2557627

21 April 2020 Similarity evaluation of 3D topological measurement results using statistical methods (Rising Researcher)

Vignesh Suresh, Yi Zheng, Xiao Zhang, Shaodong Wang, Hantang Qin, Qing Li, Beiwen Li

Proceedings Volume 11397, Dimensional Optical Metrology and Inspection for Practical Applications IX; 113970A (2020) https://doi.org/10.1117/12.2557627
Event: SPIE Defense + Commercial Sensing, 2020, Online Only

Abstract

Three dimensional (3D) topology data obtained from different optical metrology techniques tend to produce local disagreements which may yield incorrect judgement from inspectors especially under scenarios of precision metrology. This research explores statistical methods to provide a functional scoring for similarities. The investigation is conducted using two statistical methods (Pearsons correlation coefficient and image distance), two optical techniques (structured light and focus variation microscopy) and two application scenarios (metal additive printing and ballistic forensic examination). Experimental results show the promise of using statistical tools to assist binary decisions for matching/non-matching even if 3D topology data are obtained from different optical techniques.

Conference Presentation

Citation Download Citation

Vignesh Suresh, Yi Zheng, Xiao Zhang, Shaodong Wang, Hantang Qin, Qing Li, and Beiwen Li "Similarity evaluation of 3D topological measurement results using statistical methods (Rising Researcher)", Proc. SPIE 11397, Dimensional Optical Metrology and Inspection for Practical Applications IX, 113970A (21 April 2020); https://doi.org/10.1117/12.2557627

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