Comparison of nanoseconds and picoseconds laser ablation for microfabrication of planar slow-wave structures for D-band vacuum electronic devices with sheet electron beam

Andrey V. Starodubov; Alexey A. Serdobintsev; Ilya O. Kozhevnikov; Anton M. Pavlov; Viktor V. Galushka; Roman A. Torgashov; Dmitry A. Bessonov; Alexander Galkin; Nikita M. Ryskin; Valentin K. Sakharov

doi:10.1117/12.2564423

9 April 2020 Comparison of nanoseconds and picoseconds laser ablation for microfabrication of planar slow-wave structures for D-band vacuum electronic devices with sheet electron beam

Andrey V. Starodubov, Alexey A. Serdobintsev, Ilya O. Kozhevnikov, Anton M. Pavlov, Viktor V. Galushka, Roman A. Torgashov, Dmitry A. Bessonov, Alexander Galkin, Nikita M. Ryskin, Valentin K. Sakharov

Author Affiliations +

Proceedings Volume 11458, Saratov Fall Meeting 2019: Laser Physics, Photonic Technologies, and Molecular Modeling; 1145803 (2020) https://doi.org/10.1117/12.2564423
Event: Saratov Fall Meeting 2019: VII International Symposium on Optics and Biophotonics, 2019, Saratov, Russian Federation

Abstract

Design and preliminary numerical simulations of D-band planar microstrip meander-line slow wave structure for lowvoltage tubes with sheet electron beam were carried out. An original approach based on magnetron sputtering and laser ablation methods was utilized for microstrip meander-line slow wave structure microfarication. An application of nanosecond and picosecond laser ablation for microfabrication of D-band (110-170 GHz) planar microstrip meander-line slow wave structure was considered. We have verified our original approach for planar slow wave structures microfabrication by using different CNC precision laser machines operating with different values of laser pulse duration (100 ns, 8 ns, 4 ns and 10 ps). Samples of slow wave structures were fabricated and characterized by scanning electron microscopy and profilometry methods. It was shown that each considered CNC precision laser machine allows fabricating D-band microstrip meander-line slow wave structure with required dimensions, but picosecond laser ablation has such advantages as the absence of ablation products (droplets, and etc.) on the slow wave structure surface. As the next step, we are going to study S-parameters of microfabricated D-band microstrip meander-line slow wave structure samples experimentally by using vector network analyzer with D-band frequency converters.

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Andrey V. Starodubov, Alexey A. Serdobintsev, Ilya O. Kozhevnikov, Anton M. Pavlov, Viktor V. Galushka, Roman A. Torgashov, Dmitry A. Bessonov, Alexander Galkin, Nikita M. Ryskin, and Valentin K. Sakharov "Comparison of nanoseconds and picoseconds laser ablation for microfabrication of planar slow-wave structures for D-band vacuum electronic devices with sheet electron beam", Proc. SPIE 11458, Saratov Fall Meeting 2019: Laser Physics, Photonic Technologies, and Molecular Modeling, 1145803 (9 April 2020); https://doi.org/10.1117/12.2564423

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