PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
We investigate atomic model of Sn and heavier elements for the numerical simulation of the EUV emission, which is useful for optimizing EUV sources. The emission of Sn at λ=13.5 nm mainly arises from 4-4 unresolved transition array (UTA) of around 10 times ionized ion. We developed an atomic model of Sn based on computational atomic data, taking the effect of configuration interaction (CI) into account. The opacity table based on the present atomic model was used to simulate the EUV emission using the radiation hydrodynamics code. Furthermore, we will show improvement of the atomic model including heavier elements. We use machine learning (ML) algorithms to infer unknown atomic data from existing data by identifying characteristic features of UTA.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.