CONFERENCE PROCEEDINGS
Advanced Search
Home > Proceedings > Volume 11615 > Article
Presentation
22 February 2021 3D integration and process effects in superconducting qubit devices
Bethany M. Niedzielski
Author Affiliations +
Proceedings Volume 11615, Advanced Etch Technology and Process Integration for Nanopatterning X; 116150F (2021) https://doi.org/10.1117/12.2583734
Event: SPIE Advanced Lithography, 2021, Online Only
Abstract
Quantum computers perform calculations using quantum bits, or qubits, which can be made from superconducting circuits. These superconducting qubits allow direct control over device parameters while leveraging conventional Si-based fabrication techniques. MIT Lincoln Laboratory is designing and building high performance superconducting qubit devices with increased connectivity and addressability by utilizing advanced process techniques and 3D integration. Our three-tier stack architecture combines separately fabricated qubit, interposer, and routing chips with indium bump bonding. This stack contains high performance qubits, resonators, and couplers, superconducting air bridge crossovers, hard-stop spacing control, superconducting high aspect-ratio through-Si vias, and planarized superconducting routing layers. I will discuss our most recent accomplishments in the fabrication of three-tier stack devices and the effects of additional processing on the uniformity and integrity of their individual components.
Conference Presentation
© (2021) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation Download Citation
Bethany M. Niedzielski "3D integration and process effects in superconducting qubit devices", Proc. SPIE 11615, Advanced Etch Technology and Process Integration for Nanopatterning X, 116150F (22 February 2021); https://doi.org/10.1117/12.2583734
ACCESS THE FULL ARTICLE
ORGANIZATIONAL
Sign in with credentials provided by your organization.
INSTITUTIONAL
Select your institution to access the SPIE Digital Library.
SELECT YOUR INSTITUTION
PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
PERSONAL SIGN IN
No SPIE Account? Create one
PURCHASE THIS CONTENT
SUBSCRIBE TO DIGITAL LIBRARY
50 downloads per 1-year subscription
Members: $195
Non-members: $335 ADD TO CART
25 downloads per 1 - year subscription
Members: $145
Non-members: $250 ADD TO CART
PURCHASE SINGLE ARTICLE
Includes PDF, HTML & Video, when available
Members: $17.00
Non-members: $21.00 ADD TO CART
PROCEEDINGS
 PRESENTATION
WATCH
PRESENTATION SAVE TO MY LIBRARY
GET CITATION
Advertisement
Advertisement
KEYWORDS
Quantum communications
Superconductors
Bridges
Computing systems
Control systems
Fabrication
Indium
RELATED CONTENT
Subscribe to Digital Library
Receive Erratum Email Alert
Back to Top