Towards the development of backing layer for piezoelectric micromachined ultrasound transducers

Kaustav Roy; Anuj Ashok; Kritank Kalyan; Vijayendra Shastri; Anthony Jeyaseelan; Veera Pandi N.; M. M. Nayak; Rudra Pratap

doi:10.1117/12.2582504

5 March 2021 Towards the development of backing layer for piezoelectric micromachined ultrasound transducers

Kaustav Roy, Anuj Ashok, Kritank Kalyan, Vijayendra Shastri, Anthony Jeyaseelan, Veera Pandi N., M. M. Nayak, Rudra Pratap

Author Affiliations +

Proceedings Volume 11642, Photons Plus Ultrasound: Imaging and Sensing 2021; 1164240 (2021) https://doi.org/10.1117/12.2582504
Event: SPIE BiOS, 2021, Online Only

Conference Poster

Abstract

In this work, we demonstrate the use of parylene C to reduce the ring down time and enhance the fractional bandwidth of a piezoelectric micromachined ultrasound transducer (PMUT). We further study the effect of increase in thickness of parylene C on the vibration response of a PMUT such as the fundamental resonant frequency and the maximum static deflection. It is found that the increase in the thickness of the deposited parylene C film, decreases the quality factor of a PMUT, following a linear trend, with negligible effect on its fundamental resonant frequency. This can be considered to be an important finding as far as the field of ultrasound imaging is concerned, since this technique paves the way to control the axial resolution of the B-mode ultrasound scan by simply tuning a PMUT’s quality factor.

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Kaustav Roy, Anuj Ashok, Kritank Kalyan, Vijayendra Shastri, Anthony Jeyaseelan, Veera Pandi N., M. M. Nayak, and Rudra Pratap "Towards the development of backing layer for piezoelectric micromachined ultrasound transducers", Proc. SPIE 11642, Photons Plus Ultrasound: Imaging and Sensing 2021, 1164240 (5 March 2021); https://doi.org/10.1117/12.2582504

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