Transparent thin-film metrology with a high sensitivity transmission-mode quantitative phase microscope

Yujie Nie; Nansen Zhou; Li Tao; Guodong Zhou; Ni Zhao; Jianbin Xu; Renjie Zhou

doi:10.1117/12.2579035

8 March 2021 Transparent thin-film metrology with a high sensitivity transmission-mode quantitative phase microscope

Yujie Nie, Nansen Zhou, Li Tao, Guodong Zhou, Ni Zhao, Jianbin Xu, Renjie Zhou

Proceedings Volume 11653, Quantitative Phase Imaging VII; 116530E (2021) https://doi.org/10.1117/12.2579035
Event: SPIE BiOS, 2021, Online Only

Abstract

A transmission-mode high sensitivity quantitative phase microscope (QPM) is developed for profiling transparent thin film structures. The QPM system is implemented with a common-path interferometry design and a high well-depth camera, which has allowed us to achieve an optical path length difference sensitivity of around 50 picometers. A frame averaging method can be used to further improve the sensitivity. To account for multiple interference within thin films, a transmission matrix model is developed to achieve accurate height profile reconstruction. With the correction model, the profiling accuracy can be improved from 20.6% to 4.0% for a MoS₂ thin film with a thickness of around 25 nm.

Conference Presentation

Citation Download Citation

Yujie Nie, Nansen Zhou, Li Tao, Guodong Zhou, Ni Zhao, Jianbin Xu, and Renjie Zhou "Transparent thin-film metrology with a high sensitivity transmission-mode quantitative phase microscope", Proc. SPIE 11653, Quantitative Phase Imaging VII, 116530E (8 March 2021); https://doi.org/10.1117/12.2579035

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available