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5 March 2021 Optimization of laser-induced periodic surface structures formation on zirconia ceramic by ultrashort pulsed laser
Hideyuki Takada, Aiko Narazaki, Dai Yoshitomi, Kenji Torizuka, Yohei Kobayashi
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Proceedings Volume 11673, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVI; 116730V (2021) https://doi.org/10.1117/12.2583379
Event: SPIE LASE, 2021, Online Only
Abstract
Micro/nanoscale surface patterning of zirconia ceramic is needed for surface functionalization and performance enhancement, such as improved biocompatibility of medical devices, as well as device miniaturization. Therefore, formation of laser-induced periodic surface structures (LIPSS) with periods shorter than the laser wavelength on a zirconia ceramic was carried out using an ultrashort pulsed laser. In this case, it is important to shorten the processing time required for forming the LIPSS without deteriorating the processing quality. Using the various-parameters-controlled laser processing and observation system, we optimized LIPSS formation by changing parameters such as pulse duration, repetition frequency, number of shots, and fluence.
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Hideyuki Takada, Aiko Narazaki, Dai Yoshitomi, Kenji Torizuka, and Yohei Kobayashi "Optimization of laser-induced periodic surface structures formation on zirconia ceramic by ultrashort pulsed laser", Proc. SPIE 11673, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVI, 116730V (5 March 2021); https://doi.org/10.1117/12.2583379
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KEYWORDS
Pulsed laser operation
Zirconium dioxide
Laser processing
Medical devices
Optical lithography
Resistance
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