Single-pass direct laser cutting of quartz by IR femtosecond pulses

Caterina Gaudiuso; Annalisa Volpe; Antonio Ancona

doi:10.1117/12.2577177

5 March 2021 Single-pass direct laser cutting of quartz by IR femtosecond pulses

Caterina Gaudiuso, Annalisa Volpe, Antonio Ancona

Proceedings Volume 11674, Laser-based Micro- and Nanoprocessing XV; 116740E (2021) https://doi.org/10.1117/12.2577177
Event: SPIE LASE, 2021, Online Only

Abstract

In this work, we report on a single-pass method for cutting 250-μm thick Z-cut quartz plates using 200 fs laser pulses at the wavelength of 1030 nm. In particular, we delve into the influence of the process parameters, i.e. laser repetition rate, scan speed and pulse energy, on the generation of a controlled stress-induced fracture which ultimately leads to the final cut. Processing above a certain threshold pulse energy caused significant damage, resulting in poor quality cuts. Whereas, a correct combination of these parameters led to a flat and almost defect-free cut edges, in a single pass.

Conference Presentation

Citation Download Citation

Caterina Gaudiuso, Annalisa Volpe, and Antonio Ancona "Single-pass direct laser cutting of quartz by IR femtosecond pulses", Proc. SPIE 11674, Laser-based Micro- and Nanoprocessing XV, 116740E (5 March 2021); https://doi.org/10.1117/12.2577177

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