CONFERENCE PROCEEDINGS
Advanced Search
Home > Proceedings > Volume 11696 > Article
Presentation
5 March 2021 Fabrication of optical components and micro- and nanofluidic devices in polymers by 172 nm direct photoablation
Andrey E. Mironov, Jinhong Kim, Austin W. Steinforth, Sehyun Park, Dane J. Sievers, Sung-Jin Park, James G. Eden
Author Affiliations +
Proceedings Volume 11696, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XIV; 116960K (2021) https://doi.org/10.1117/12.2583254
Event: SPIE OPTO, 2021, Online Only
Abstract
Complex 3D structures having lateral and depth resolutions of <1 µm and 20 nm, respectively, are fabricated in various polymers, including PMMA, ABS, CR-39, and others, by a direct photoablation process utilizing 172 nm radiation from flat microplasma-driven excimer lamps. The developed process does not require any toxic or photosensitive materials, and, therefore, may be performed outside of a clean room. The fabricated 3D structures may also serve as a master mold for PDMS and the curing of other materials.
Conference Presentation
© (2021) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation Download Citation
Andrey E. Mironov, Jinhong Kim, Austin W. Steinforth, Sehyun Park, Dane J. Sievers, Sung-Jin Park, and James G. Eden "Fabrication of optical components and micro- and nanofluidic devices in polymers by 172 nm direct photoablation", Proc. SPIE 11696, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XIV, 116960K (5 March 2021); https://doi.org/10.1117/12.2583254
ACCESS THE FULL ARTICLE
ORGANIZATIONAL
Sign in with credentials provided by your organization.
INSTITUTIONAL
Select your institution to access the SPIE Digital Library.
SELECT YOUR INSTITUTION
PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
PERSONAL SIGN IN
No SPIE Account? Create one
PURCHASE THIS CONTENT
SUBSCRIBE TO DIGITAL LIBRARY
50 downloads per 1-year subscription
Members: $195
Non-members: $335 ADD TO CART
25 downloads per 1 - year subscription
Members: $145
Non-members: $250 ADD TO CART
PURCHASE SINGLE ARTICLE
Includes PDF, HTML & Video, when available
Members: $17.00
Non-members: $21.00 ADD TO CART
PROCEEDINGS
 PRESENTATION
WATCH
PRESENTATION SAVE TO MY LIBRARY
GET CITATION
Advertisement
Advertisement
KEYWORDS
Polymers
Optical components
Clean room processes
Excimer lasers
Excimers
Lamps
Photosensitive materials
RELATED CONTENT
Subscribe to Digital Library
Receive Erratum Email Alert
Back to Top