A high-precision automatic phase shifting algorithm with wavelength tuning

Shu Su; Ping Zhong; Xin Tang; Zhisong Li; Tianbao Zhai; Niuqi Li; Wei Zheng

doi:10.1117/12.2585186

2 December 2020 A high-precision automatic phase shifting algorithm with wavelength tuning

Shu Su, Ping Zhong, Xin Tang, Zhisong Li, Tianbao Zhai, Niuqi Li, Wei Zheng

Proceedings Volume 11717, 24th National Laser Conference & Fifteenth National Conference on Laser Technology and Optoelectronics; 117170O (2020) https://doi.org/10.1117/12.2585186
Event: 24th National Laser Conference & Fifteenth National Conference on Laser Technology and Optoelectronics, 2020, Shanghai, China

Abstract

The wavelength tuning interferometer is widely used in the detection of large-aperture optical components. Limited by the accuracy of wavelength modulation, the calculation of phase shift is difficult to meet the accuracy requirements. At present, the least squares iterative algorithm is often used to solve the phase. However, this algorithm needs to accurately calibrate the cavity length first, and the calculation error of the phase shift amount in some specific intervals is large, especially when there is a contrast difference between the interferograms, the detection accuracy is even more difficult to meet the requirements. This paper proposes a method to analyze the phase shift directly from the interferogram, using an improved iterative algorithm to calculate the wave-front phase, and proposes a self-applicable segmentation processing method for the phase calculation in a specific interval to meet the system accuracy and robustness requirements. The validity of the proposed method is verified by the modeling method, and the existing wavelength-tunable laser interferometer is used to test the sample. The repeatability of PV value and RMS value are λ⁄50 and λ⁄100 respectively.

Citation Download Citation

Shu Su, Ping Zhong, Xin Tang, Zhisong Li, Tianbao Zhai, Niuqi Li, and Wei Zheng "A high-precision automatic phase shifting algorithm with wavelength tuning", Proc. SPIE 11717, 24th National Laser Conference & Fifteenth National Conference on Laser Technology and Optoelectronics, 117170O (2 December 2020); https://doi.org/10.1117/12.2585186

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