Nanometer-accuracy two-dimensional targets detection by orthogonal self-mixed laser interferometry

ChangYan Zha; Yufeng Tao; Chunsan Deng; Jingwei Liu; Linlin Zhou; Ruiqing Wang; Song Cai

doi:10.1117/12.2587347

2 December 2020 Nanometer-accuracy two-dimensional targets detection by orthogonal self-mixed laser interferometry

ChangYan Zha, Yufeng Tao, Chunsan Deng, Jingwei Liu, Linlin Zhou, Ruiqing Wang, Song Cai

Proceedings Volume 11717, 24th National Laser Conference & Fifteenth National Conference on Laser Technology and Optoelectronics; 117172P (2020) https://doi.org/10.1117/12.2587347
Event: 24th National Laser Conference & Fifteenth National Conference on Laser Technology and Optoelectronics, 2020, Shanghai, China

Abstract

Optical lithography or 3D printing operates on multi-dimensional movement at high resolution. Therefore, accurate position of both x-axis and y-axis deserves real-time measurement. Herein, we utilizes a half-external cavity orthogonal self-mixing laser interferometry for determining displacement of two independent targets. Synchronous detection of irrelevant displacements with nanometer accuracy (<10 nm) is realized here. Circularly polarized laser beam is optically-multiplexed into two polarization states for two additional external cavity. The laser system only needs a single-channel optical intensity to reflect the perpendicular displacement without reference path, which is conducive to simplify the acquisition channel and collimation.

Citation Download Citation

ChangYan Zha, Yufeng Tao, Chunsan Deng, Jingwei Liu, Linlin Zhou, Ruiqing Wang, and Song Cai "Nanometer-accuracy two-dimensional targets detection by orthogonal self-mixed laser interferometry", Proc. SPIE 11717, 24th National Laser Conference & Fifteenth National Conference on Laser Technology and Optoelectronics, 117172P (2 December 2020); https://doi.org/10.1117/12.2587347

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