A shop-friendly removal function characterization method for MRF spots

Johnathan Davis; Chris Supranowitz

doi:10.1117/12.2602368

28 October 2021 A shop-friendly removal function characterization method for MRF^TM spots

Johnathan Davis, Chris Supranowitz

Proceedings Volume 11889, Optifab 2021; 118891C (2021) https://doi.org/10.1117/12.2602368
Event: SPIE Optifab, 2021, Rochester, New York, United States

Abstract

To achieve optimal polishing convergence results, the removal function of the tool should be accurately characterized. This removal function is termed a “spot” in Magnetorheological Finishing (MRF), and for best results the spot should be characterized with nanometer-level accuracy. Such precise results have typically been obtained with an interferometer, which can provide the necessary accuracy as well as good lateral spatial resolution. However, interferometers are often in high demand during optical fabrication, have limited slope capture range (complicating measurement of especially high removal rates or small spots), and aren’t always ideal for the “shop floor” environment. QED has developed a measurement method for spots to address these shortcomings. It is more compact, potentially less expensive, less environmentally sensitive, and has more slope capture range compared to a typical interferometer. Used in conjunction with QED’s spot morphing algorithm, only plano optical substrates are needed to measure material specific removal function characteristics, which can then be applied to a wide range of part geometries of the same material type. Spots characterized with the new method are shown to provide excellent polishing convergence and are highly consistent with interferometric data. In conclusion, the new method is ideal for conveniently and cost-effectively measuring spots on the shop floor.

Conference Presentation

Citation Download Citation

Johnathan Davis and Chris Supranowitz "A shop-friendly removal function characterization method for MRF^TM spots", Proc. SPIE 11889, Optifab 2021, 118891C (28 October 2021); https://doi.org/10.1117/12.2602368

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