2D sizing measuring system of regular particles by semi-automatic image analysis technique

Sen Zhou; Long Chen; Jin Zhou; Yu Yan

doi:10.1117/12.2600718

9 October 2021 2D sizing measuring system of regular particles by semi-automatic image analysis technique

Sen Zhou, Long Chen, Jin Zhou, Yu Yan

Proceedings Volume 11896, Advanced Optical Imaging Technologies IV; 118960Q (2021) https://doi.org/10.1117/12.2600718
Event: SPIE/COS Photonics Asia, 2021, Nantong, JS, China

Conference Poster

Abstract

In this paper, a 2-D sizing measuring system of regular particles is developed for characterizing the shapes by simultaneously measuring their length and width. Due to the multi-regulars shape of particles, it is usually required in situ 2D semi-automatic imaging analysis technique to describe their different shapes. In our works, edges of particles in binary image are first detected based on automatic threshold decomposition of the original gray-scale image. Then, the internal holes are filled in some individual detection region. In order to separate from different regular shapes, a selected threshold for the rectangularity filter has been applied. Then, by use of Euclidean distance map (EDM), the size measurement of individual particle is calculated. Finally, a series of experiments on these selected electron micro graphs , which contains particle with sizes from 10nm to 200nm, are respectively carried out to verify the performance of previous image analysis technology on our developed software. Those results are most promising for on-machine applications in naon-dimensional measurement of regular particles.

Citation Download Citation

Sen Zhou, Long Chen, Jin Zhou, and Yu Yan "2D sizing measuring system of regular particles by semi-automatic image analysis technique", Proc. SPIE 11896, Advanced Optical Imaging Technologies IV, 118960Q (9 October 2021); https://doi.org/10.1117/12.2600718

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