Research on the equal optical path interferometer

Huaikang Zhu; Dayong Zhu; Wenxin Jia; Roujing Chen; Qiyuan Zhang; Sen Han

doi:10.1117/12.2603718

9 October 2021 Research on the equal optical path interferometer

Huaikang Zhu, Dayong Zhu, Wenxin Jia, Roujing Chen, Qiyuan Zhang, Sen Han

Proceedings Volume 11899, Optical Metrology and Inspection for Industrial Applications VIII; 118991C (2021) https://doi.org/10.1117/12.2603718
Event: SPIE/COS Photonics Asia, 2021, Nantong, JS, China

Conference Poster

Abstract

The equal optical path interferometer is a modified type of measuring device, which is used to improve the quality of interferences between multiple surfaces. In some cases, this modified kind of interferometer can polish the quality of images by bettering the character of interferences between multiple surfaces, which can not be ignored in traditional interferometers, such as the Fizeau interferometer and the Twyman Green interferometer. This paper mainly introduces the basic principles of equal optical path interferometer, and we carry out a series of simulations and do some analyses of equal optical path interferometer, in order to get a better solution. The main characteristic of equal optical path interferometer is equal optical path, which is realized by the inclinations of the reference lens and the beam splitting lens. There is a certain relationship between the inclination of the reference lens and the beam splitting lens. We use MATLAB and C language to simulate the relationships between mechanisms of it, and find out the influence weights and boundary conditions of each mechanism on the overall structure. Then according to the relationships between various mechanisms, the relatively good relations and structures are obtained, which are convenient for the realization of the actual experimental verification. According to the calculated results, we use Zemax to simulate and optimize them, and get the theoretical results of the experiment. Based on the theory-based calculations and simulations, we confirm that the equal optical path interferometer has the possibility of practical implementation, and the theory has a certain guiding significance for the experimental verification.

Citation Download Citation

Huaikang Zhu, Dayong Zhu, Wenxin Jia, Roujing Chen, Qiyuan Zhang, and Sen Han "Research on the equal optical path interferometer", Proc. SPIE 11899, Optical Metrology and Inspection for Industrial Applications VIII, 118991C (9 October 2021); https://doi.org/10.1117/12.2603718

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