Pulse shape controlled  MOPA fiber laser for marking of Si wafer

Lingling Zhang; Tianjiao Shu; Guoqi Li; Yuan Chen; Yuanchao Du; Xuanjun Zhang; Jie Zhang

doi:10.1117/12.2603114

31 August 2021 Pulse shape controlled MOPA fiber laser for marking of Si wafer

Lingling Zhang, Tianjiao Shu, Guoqi Li, Yuan Chen, Yuanchao Du, Xuanjun Zhang, Jie Zhang

Proceedings Volume 11907, Sixteenth National Conference on Laser Technology and Optoelectronics; 119072A (2021) https://doi.org/10.1117/12.2603114
Event: Sixteenth National Conference on Laser Technology and Optoelectronics, 2021, Shanghai, China

Abstract

Pulsed lasers were used extensively in material processing including cutting, drilling and marking. The temporal shape and duration of the pulse were important in optimizing the material processing quality. The flexible parameters of MOPA pulsed fiber laser can offer a broad range of material response characteristics. In this report, a MOPA pulsed fiber laser was configured with pulse duration from 2 to 500 ns and PRF that ranged from single shot to 4000kHz.Pulse energy up to 1mJ to investigate independently the contributions of each of these parameters on the marking process of Si wafer. Various experiments were presented to require the high quality marking on Si wafer. Topography evolution pictures of dot were taken and the depths were measured. Experimental results showed that single pulse energy had a significant influence on the threshold of the visible mark. Pulse numbers had more impact on the dot topography. Pulse energy and pulse duration had more influence on the mark depth. In order to control finely the mark depth, single pulse energy and pulse numbers should be optimized.

Citation Download Citation

Lingling Zhang, Tianjiao Shu, Guoqi Li, Yuan Chen, Yuanchao Du, Xuanjun Zhang, and Jie Zhang "Pulse shape controlled MOPA fiber laser for marking of Si wafer", Proc. SPIE 11907, Sixteenth National Conference on Laser Technology and Optoelectronics, 119072A (31 August 2021); https://doi.org/10.1117/12.2603114

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