Automatic design of the build-in lens mask for three-dimensional photo lithography

Tomoaki Osumi; Masaru Sasago; Masaaki Yasuda; Yoshihiko Hirai

doi:10.1117/12.2598156

23 August 2021 Automatic design of the build-in lens mask for three-dimensional photo lithography

Tomoaki Osumi, Masaru Sasago, Masaaki Yasuda, Yoshihiko Hirai

Proceedings Volume 11908, Photomask Japan 2021: XXVII Symposium on Photomask and Next-Generation Lithography Mask Technology; 1190809 (2021) https://doi.org/10.1117/12.2598156
Event: Photomask Japan 2021, 2021, Online Only

Abstract

Automatic design systems of the Built-in Lens Mask (BILM) for three-dimensional photo lithography will be presented based on conventional feedback control procedure. The 3Dstructure, which is imaged by BILM sometimes missing the pattern due to optical interferences. By optimization of the BILM mask, the optical image becomes fine, smooth and unity.

Citation Download Citation

Tomoaki Osumi, Masaru Sasago, Masaaki Yasuda, and Yoshihiko Hirai "Automatic design of the build-in lens mask for three-dimensional photo lithography", Proc. SPIE 11908, Photomask Japan 2021: XXVII Symposium on Photomask and Next-Generation Lithography Mask Technology, 1190809 (23 August 2021); https://doi.org/10.1117/12.2598156

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