Monolithic multiwavelength VCSEL array with intra-cavity grating

Antoine Pissis; Urs Siegenthaler; Donato Bonfrate; Pratyush Das Kanungo; Evgeny Zibik

doi:10.1117/12.2606826

2 March 2022 Monolithic multiwavelength VCSEL array with intra-cavity grating

Antoine Pissis, Urs Siegenthaler, Donato Bonfrate, Pratyush Das Kanungo, Evgeny Zibik

Proceedings Volume 12020, Vertical-Cavity Surface-Emitting Lasers XXVI; 120200D (2022) https://doi.org/10.1117/12.2606826
Event: SPIE OPTO, 2022, San Francisco, California, United States

Abstract

We report a novel concept of tuning the VCSEL wavelength by varying the optical thickness of the laser cavity. This is achieved by implementing an intra-cavity grating pattern with a variable fill factor. The optical thickness of the cavity and the corresponding resonance wavelength will depend on the fill factor of the grating, its height and the refractive index contrast between the overgrowth and the grating layers. We developed a fabrication process based on two steps growth epitaxy and a lithographic intra-cavity grating to define the VCSEL wavelength at the emitter level. A 20 nm wide tuning range around 940nm has been demonstrated using this technique.

Citation Download Citation

Antoine Pissis, Urs Siegenthaler, Donato Bonfrate, Pratyush Das Kanungo, and Evgeny Zibik "Monolithic multiwavelength VCSEL array with intra-cavity grating", Proc. SPIE 12020, Vertical-Cavity Surface-Emitting Lasers XXVI, 120200D (2 March 2022); https://doi.org/10.1117/12.2606826

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available