Real-time wavelength compensation of laser diode interferometer

Yindi Cai; Zhixiang Wen; Luhui Wang; Kuang-Chao Fan

doi:10.1117/12.2619993

9 December 2021 Real-time wavelength compensation of laser diode interferometer

Yindi Cai, Zhixiang Wen, Luhui Wang, Kuang-Chao Fan

Proceedings Volume 12030, Third International Conference on Optoelectronic Science and Materials (ICOSM 2021); 120300G (2021) https://doi.org/10.1117/12.2619993
Event: Third International Conference on Optoelectronic Science and Materials (ICOSM 2021), 2021, Hefei, China

Abstract

Laser diode interferometers, which have the advantages of low-cost and miniature, can be applies as the position sensor of the micro/nano positioning stage for on-line displacement measurement. However, the accuracy and the stability of the laser diode wavelength are poor, which will significantly affect the measurement accuracy of the laser diode interferometer. Therefore, in order to improve the measurement accuracy of the laser diode interferometers, a wavelength measurement method based on the principle of the diffraction grating and a wavelength stabilization method based on the automatic temperature control are proposed to real-time correct and stabilize the laser wavelength in this paper. A group of experiments are conducted to demonstrate the feasibility of the proposed methods.

Citation Download Citation

Yindi Cai, Zhixiang Wen, Luhui Wang, and Kuang-Chao Fan "Real-time wavelength compensation of laser diode interferometer", Proc. SPIE 12030, Third International Conference on Optoelectronic Science and Materials (ICOSM 2021), 120300G (9 December 2021); https://doi.org/10.1117/12.2619993

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