Ultra-precision grinding and accuracy measurement of the hard-brittle thin-walled tubular optics

Hang Yin; Sheng Wang; Qingliang Zhao; Bing Guo; Jianbo Zhao

doi:10.1117/12.2604310

13 December 2021 Ultra-precision grinding and accuracy measurement of the hard-brittle thin-walled tubular optics

Hang Yin, Sheng Wang, Qingliang Zhao, Bing Guo, Jianbo Zhao

Author Affiliations +

Proceedings Volume 12071, 10th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing and Metrology Technologies; 120710H (2021) https://doi.org/10.1117/12.2604310
Event: Tenth International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2021), 2021, Chengdu, China

Abstract

Hard-brittle thin-walled tubular optics are widely used in the field of high-power solid-state lasers. The 3D accuracy requirement and the clamping deformation of the hard and brittle thin-walled structure pose a great challenge for ultra-precision manufacturing. In this paper, fused silica thin-walled tubular optics with the length of 100mm, the inner diameter of 42mm and the outer diameter of 50mm were fabricated successfully through ultra-precision grinding. The profile accuracy of PV1.6μm, the surface roughness of Ra10nm, the straightness of 1.64μm, the roundness of 1.62μm and the cylindricity of 2.13μm were achieved through in-place dressing of grinding wheel, on-machine measurement, off-line measurement, and the iterative compensation machining. The technical difficulties of ultra-precision manufacturing of hard brittle thin-walled optics have been overcome.

Citation Download Citation

Hang Yin, Sheng Wang, Qingliang Zhao, Bing Guo, and Jianbo Zhao "Ultra-precision grinding and accuracy measurement of the hard-brittle thin-walled tubular optics", Proc. SPIE 12071, 10th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing and Metrology Technologies, 120710H (13 December 2021); https://doi.org/10.1117/12.2604310

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